If anyone needs to replace there solenoids I bought them from the site below its for a 02 626 but the number stamped on the part is the same number stamped on the solenoid on my P5, if this is a repost then my bad, but I figured I would share my find, because this has fixed my acceleration problem instantly and it cleared code P0660
http://www.partstrain.com/store/details/Mazda/626/OES_Genuine/EGR_Vacuum_Solenoid/2002/W0133-1760479.html?ptc=S1171391678W45d204bec356b&ptoegemazda62619982002oesgenuinew0133-1760479102egvaso
http://www.partstrain.com/store/details/Mazda/626/OES_Genuine/EGR_Vacuum_Solenoid/2002/W0133-1760479.html?ptc=S1171391678W45d204bec356b&ptoegemazda62619982002oesgenuinew0133-1760479102egvaso